Discovering MEMS and Microtechnology
This site is dedicated to Microelectromechanical Systems (aka MEMS, aka Microsystems), and Microtechnology, that is the tool to fabricate them and microelectronic devices. The goal is to propose a complete view of MEMS devices, integrating concerns about the application, microactuators principles, and microfabrication process.
I have also included related topics, such as a solid mechanics introduction, and some resources about making a website based on the difficulties I've met myself.
If you wish to use some of the content you find here, please feel free to ask me first, and there should not be any reason for me to refuse, as long as you state where you've got it.
- Introduce myself...
- Where I talk about...me! This includes my PhD research project.
- MEMS
- Microelectromechanical systems (MEMS). This section provides informations about applications, microactuators principles, and a sample process fabrication.
- Microtechnology
- Integrated circuits (microelectronic devices and MEMS) use microtechnology to be fabricated. Want to know how we build tiny devices? This explains the art of microfabrication!
- Introduction to solid mechanics
- Design of MEMS requires at least a minimal knowledge of solid mechanics. This section tries to explain the basics of stress and strain calculations.
- Electrostatics: from the single charge to Dielectrophoresis
- Electrostatics is one of the major tool used in MEMS technology. It is used as well as a direct actuation method or it can leads to dielectrophoresis, that allows contactless manipulation of micro-object. This section presents both the pure electrostatic principle and the calculation of the dielectrophoretic force.
- Creating a website
- Having ever heard of HTML, XHTML, PHP, Javascript? This section is for people who want to know what hides behind web pages and what esoteric work do website editor programs.
For any request about getting content from this site, suggestions, english corrections (thanks by advance to all english native who would correct me...) or anything else but advertisement(!!) you can contact me at matthieu.lagouge AT free.fr.
This site was made with Bluefish
and some sections are still to be completed... There are still a lot to do, but i hope you'll be satisfied of your visit with what have already been uploaded.
This site is as much compliant as i could do with the W3C standards.
This site has been visited times (but in fact I'm not at all confident with this counter accuracy...).