MEMS World - Piezoelectric materials

Piezoelectric materials, called familiarily piezo, are materials that show a small strain when they're placed under an electric field. This small strain is not so useful at macroscale, but at a MEMS scale, this becomes very interesting for microactuators!
This page introduces the piezoelectric property and how microtechnology uses it to make interesting microactuators.

Piezoelectric materials properties

Piezoelectric processing in microtechnology

Piezoelectric based actuators in MEMS