MEMS World - Shape Memory Alloys: SMA

Shape memory alloys (aka SMA) are materials that have the uncommon property to be deformable at low temperature and get back their original shape when they're heated.
This property has long been known, and MEMS researchers have rapidly tried to use it in their microactuators design, and developed microfabrication technology to deposit SMA as layers on substrates.
This page introduces the materials themselves, their properties, and their use in MEMS.

Shape Memory Alloys: the materials

SMA deposition in microtechnology

SMA based microactuators