Microtechnology - Lift-off

Lift-off is a particular technique to pattern a material layer on a substrate with no etching step, just by using lithography techniques. As this step is quite different from what have been shown before in microtechnology's lithography, etching, and deposition, I introduce it in a different page. In fact, the lift-off step consists in a lithography with no development step, then the deposition of the target material, then the development of the resist! This page explains it a bit more clearly, and describes the cases in which lift-off is used.

Microtechnology process

Materials adapted to lift-off

Resists and the gasket profile